Refurbished and New Semiconductor Equipment, Spare Parts and Service
Established in 2014 and located in Silicon Valley, California, USA, SemiStar Corp. supplies refurbished semiconductor equipment, new semiconductor equipment, spare parts, upgrade solutions, and technical services to semiconductor manufacturers, universities, research institutes, and R&D organizations worldwide.
SemiStar has extensive experience supporting compound semiconductor manufacturing and research, including GaAs, InP, GaN, SiC, RF devices, photonics, optoelectronics, and advanced materials applications. Our customers range from universities and pilot lines to commercial semiconductor fabs and production facilities.
We serve a broad range of markets including Compound Semiconductor, Nanofabrication (NanoFab), MEMS, Power Semiconductor, Electric Vehicle (EV), RF and Microwave Devices, Photonics, Optoelectronics, Advanced Packaging, Aerospace & Defense, Quantum Technology, Sensors, Research Laboratories, and University Semiconductor Programs.
Our product portfolio includes RTP/RTA/RTO systems, plasma ashers, plasma etchers, RIE, ICP, DRIE, PECVD, LPCVD, ALD, sputter systems, evaporators, mask aligners, diffusion furnaces, metrology systems, SEM, wafer probers, semiconductor spare parts, and upgrade solutions for legacy semiconductor equipment.

Silicon Valley Area | California | USA
Our Core Business
Refurbished Semiconductor Equipment
Supply of refurbished semiconductor equipment including RTP/RTA/RTO systems, plasma ashers, plasma etchers, RIE, ICP, DRIE, PECVD, LPCVD, ALD, sputter systems, evaporators, mask aligners, diffusion furnaces, metrology systems, SEM, wafer probers and tester instruments.
New Semiconductor Equipment
Sales and support of selected new semiconductor equipment Rapid Thermal Processors, X-ray inspection systems, plasma Asher, Cleaning, RIE, ICP, DRIE, PECVD, ALD, PEALD, PA-MOCVD, systems, diffusion furnaces, PLCVD, LPCVD, E-Beam / Thermal Evaporator, Sputtering Systems, Spin Rinse Dryers, Wet & Cleaning Systems, Optical Coating Systems, Spin Coaters, Dip Coaters, 200mm, 300mm Test Wafers / Aluminum Wafer.
Semiconductor Spare Parts
Semiconductor spare parts, replacement assemblies, refurbished modules and hard-to-find legacy components for semiconductor manufacturing equipment: AG Associates Heatpulse RTP Parts ,4″ to 18″ Si Wafer Carriers, Susceptors & SiC components, Robot, Controller & Pre-Aligner Accessories, Quartz, Ceramic & Silicon Components , 200mm / 300mm Test Silicon Wafers / Aluminum Wafers / Silicon Ingots, Silicon Carbide (SiC) Parts , Vacuum Pumps / Compressor Accessories, Chillers & Heat Exchanger Accessories , TC Wafers AMAT, Branson, Brooks, Equipe, PRI, Gasonics, Lam, Matrix, Mattson, Novellus, Tegal, TEL Spare Parts.
4″ to 18″ Si Wafer Carrier
Standard silicon wafer carriers are commonly used for wafer handling, lithography, deposition, etch, inspection, process development, and production applications.Various carrier solutions have been supplied for Applied Materials, Lam Research, ASML, TEL, Intel, and other semiconductor equipment companies. Custom carriers using Si ingot, quartz, ceramic, aluminum, or other materials can be manufactured according to customer drawings.
Why SemiStar
- Strong experience in compound semiconductor fabs (GaAs, InP, GaN, SiC)
- Proven refurbishment and upgrade capability
- Engineering-driven support
- Global logistics and supply experience
Partnership Opportunities
We welcome partnerships with OEMs to represent and sell their new equipment in North America, and with distributors to expand the global reach of our refurbished and upgraded semiconductor equipment.
For OEM Partners in North America
Expand your presence in North America through SemiStar’s established sales channels and technical support. SemiStar has long-term relationships with compound semiconductor fabs, RF device manufacturers, universities, R&D organizations, defense-related contractors, and pilot-line development groups throughout North America.
We welcome OEM partnerships that create long-term value for both parties. SemiStar’s interest is not limited to one-time lead referrals. We seek sustainable business relationships built on clearly defined roles, responsibilities, customer development, sales activities, technical support, and mutual growth objectives.
If there is a strong fit between your technology and our customer base, we would be pleased to explore opportunities for sales representation, distribution, business development, customer support, and other cooperative models in North America.
For Distributors and Business Partners
SemiStar welcomes cooperation with distributors, representatives, service organizations, equipment brokers, consultants, and other business partners worldwide. Depending on the opportunity, cooperation may include sales lead referrals, equipment sales support, local customer support, installation and service activities, or complete sales and service representation.
Our product portfolio includes refurbished RTP/RTA/RTO systems, plasma ashers, plasma etchers, RIE, ICP, DRIE, PECVD, LPCVD, ALD, sputter systems, evaporators, mask aligners, diffusion furnaces, metrology systems, SEM, wafer probers, testers, spare parts, upgrade solutions, and engineering services.
We are interested in long-term business relationships that create value for both parties through customer development, sales activities, technical support, local service capabilities, and sustainable business growth.
Looking for Equipment or Partnership?
Contact SemiStar today for solutions and cooperation opportunities.